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Acta Optica Sinica, Volume. 39, Issue 7, 0712005(2019)

Method for Surface Quality Inspection Based on Total Scattering Measurement

Cong Huang1, Kepeng Zhang2, Xiang Wang1, Nianchun Sun1, Bin Zhang1、*, Jian Chen3, and Jianhua Zhao3
Author Affiliations
  • 1 College of Electronics and Information Engineering, Sichuan University, Chengdu, Sichuan 610065, China
  • 2 Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 3 Anhui Province Key Laboratory of Non-Destructive Evaluation, ZC Optoelectronic Technologies. LTD., Hefei, Anhui 230031, China
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    Article index updated: Mar. 10, 2025

    The article is cited by 7 article(s) CLP online library. (Some content might be in Chinese.)
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    Cong Huang, Kepeng Zhang, Xiang Wang, Nianchun Sun, Bin Zhang, Jian Chen, Jianhua Zhao. Method for Surface Quality Inspection Based on Total Scattering Measurement[J]. Acta Optica Sinica, 2019, 39(7): 0712005

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    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Jan. 14, 2019

    Accepted: Mar. 25, 2019

    Published Online: Jul. 16, 2019

    The Author Email: Zhang Bin (zhangbinff@sohu.com)

    DOI:10.3788/AOS201939.0712005

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology