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Opto-Electronic Engineering, Volume. 46, Issue 12, 180507(2019)

Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry

Fan Zhentao1,2,3, Tang Yuanyuan1,2、*, Wei Kai1,2, Chen Ying4, and Zhang Yudong1,2
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
  • 4[in Chinese]
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    Fan Zhentao, Tang Yuanyuan, Wei Kai, Chen Ying, Zhang Yudong. Measurement of polarization correlation coefficients of light source and spectrometer in spectroscopic ellipsometry[J]. Opto-Electronic Engineering, 2019, 46(12): 180507

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    Paper Information

    Category: Article

    Received: Sep. 28, 2018

    Accepted: --

    Published Online: Jan. 9, 2020

    The Author Email: Yuanyuan Tang (yytang001@126.com)

    DOI:10.12086/oee.2019.180507

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology