Fig. 1. Schematic diagram of EMDM structure

Fig. 2. Edge effect of parallel flat capacitor. (a) Ideal parallel capacitance driver model; (b) EMDM electric field distribution; (c) Charge distribution of EMDM conductive membranes

Fig. 3. Schematic diagram of EMDM electrode distribution

Fig. 4. Mirror surface pattern under the action of EMDM center electrode. (a) Mirror surface profile for numerical simulation; (b) Mirror surface profile for the proposed model; (c) Mirror surface profile for the ideal model

Fig. 5. Surface shape fitting error between proposed model and ideal model under different electrode spacing d

Fig. 6. Actual results of correcting the out-of-focus aberration by different models. (a) Simulation results of correcting the out-of-focus aberration; (b) Practical results of the ideal model for correcting the out-of-focus aberration; (c) Practical results of proposed model for correcting the out-of-focus aberration

Fig. 7. Process flow diagram for comparing wavefront correction capability analysis

Fig. 8. Comparative analysis curves of the accuracy of the proposed model in this thesis and the ideal model for the first 15 Zernike aberration generation assessment