Opto-Electronic Engineering, Volume. 52, Issue 5, 250025(2025)

Electrostatically driven membrane deformable mirror edge effects and their influence on the evaluation of correction capability

Haolei Jia1,2,3,4, Naiting Gu5、*, and Libo Zhong1,2
Author Affiliations
  • 1National Laboratory on Adaptive Optics, Chengdu, Sichuan 610209, China
  • 2Institute of Optics and Electronics, Chinese Academy of Sciences, Chengdu, Sichuan 610209, China
  • 3University of Chinese Academy of Sciences, Beijing 100049, China
  • 4School of Electronic, Electrical and Communication Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
  • 5College of Advanced Interdisciplinary Studies, National University of Defense Technology, Changsha, Hunan 410073, China
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    Electrostatically driven membrane deformable mirrors correct wavefront aberrations through electrostatic forces, whose correction capability dependent on driving load accuracy. Due to the charge aggregation at the electrode edges, non-uniform deformation occurs due to the nonlinear change of the regional load, which causes inaccurate or incorrect assessment of the calibrated wavefront aberration of electrostatically driven membrane deformable mirrors. Based on this, this work carries out a study on electrostatically driven membrane deformable mirror electrode edge effect and its influence on correction capability assessment, establishes a theoretical model of electrode edge effect, and quantitatively analyzes the influence of electrode edge deformation response and correction capability assessment accuracy based on the model, and the results show that before and after the consideration of the edge effect, the error of correction capability assessment is improved from 25.49% to 6.83% or even lower, and applies to different electrode spacing parameters, which verifies the correctness of the theoretical model proposed in this paper.

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    Haolei Jia, Naiting Gu, Libo Zhong. Electrostatically driven membrane deformable mirror edge effects and their influence on the evaluation of correction capability[J]. Opto-Electronic Engineering, 2025, 52(5): 250025

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    Paper Information

    Category: Article

    Received: Feb. 8, 2025

    Accepted: Mar. 25, 2025

    Published Online: Jul. 18, 2025

    The Author Email: Naiting Gu (顾乃庭)

    DOI:10.12086/oee.2025.250025

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