Acta Optica Sinica, Volume. 33, Issue 10, 1009001(2013)

Surface Profile Measurement of Microstructures Based on Dual-Wavelength Digital Microscopic Image-Plane Holography

Zeng Yanan*, Wang Fei, Lei Hai, Hu Xiaodong, and Hu Xiaotang
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    Zeng Yanan, Wang Fei, Lei Hai, Hu Xiaodong, Hu Xiaotang. Surface Profile Measurement of Microstructures Based on Dual-Wavelength Digital Microscopic Image-Plane Holography[J]. Acta Optica Sinica, 2013, 33(10): 1009001

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    Paper Information

    Category: Holography

    Received: Apr. 19, 2013

    Accepted: --

    Published Online: Aug. 21, 2013

    The Author Email: Yanan Zeng (ynzeng@tju.edu.cn)

    DOI:10.3788/aos201333.1009001

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