Optics and Precision Engineering, Volume. 33, Issue 10, 1515(2025)

Parallelism measurement of flat glass based on an interferometric fringe region growth algorithm

Mingjun WANG1, Yifan HUANG1,3, Shijie LIU2、*, Liangwei LI1,3, Pengbo LI1,3, Junda LI1,3, Fulin WU3, Xueke XU3, and Zhufeng SHAO4
Author Affiliations
  • 1School of Automation and Information Engineering, Xi'an University of Technology, Xi'an70048, China
  • 2Precision Optical Manufacturing and Testing Center, Shanghai Institute of Optics Fine Machanics, Chinese Academy of Sciences, Shanghai01800, China
  • 3Hengmai Optical Precision Machinery (Hangzhou) Co. Ltd, Hangzhou11421, China
  • 4China Academy of Building Materials Science, Beijing10002, China
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    References(38)

    [1] 柯金昌. 平板玻璃的平行度快速检测研究[D], 8-15(2012).

         KE J C. Study on Rapid Detection of Parallelism of Flat Glass[D], 8-15(2012).

    [2] 柯金昌, 梁秀玲. 基于MATLAB的平板玻璃不平行度快速检测设计[J]. 电子测量技术, 34, 92-96(2011).

         KE J C, LIANG X L. Design of rapid detection of flat glass non-parallelism based on MATLAB[J]. Electronic Measurement Technology, 34, 92-96(2011).

    [3] MOONA G, SHARMA R, KIRAN U et al. A comparative investigation for flatness and parallelism measurement uncertainty evaluation using laser interferometry and image processing[J]. Indian Journal of Engineering and Materials Sciences, 31, 261-267(2024).

    [4] 王之江[M]. 光学技术手册-上册, 798-799(1987).

         WANG Z J[M]. Handbook of Optical Technology-Volume I, 798-799(1987).

    [5] WU X M. Research on Anti-Vibration Technology in Optical Interference Testing[D], 5-20(2002).

         吴新民. 光干涉测试中的抗振技术研究[D], 5-20(2002).

    [6] 贺和好, 叶露, 周兴义. 平行度测试仪原理及其测量精度分析[J]. 光电工程, 34, 52-56(2007).

         HE H H, YE L, ZHOU X Y et al. Theory and precision analysis of testing apparatus of parallel depth[J]. Opto-Electronic Engineering, 34, 52-56(2007).

    [7] DE GROOT P, BIEGEN J, CLARK J et al. Optical interferometry for measurement of the geometric dimensions of industrial parts[J]. Applied Optics, 41, 3853-3860(2002).

    [8] ZHAO J L, SANG Y, DUAN F H et al. High-precision surface parallelism measurement using digital image correlation method[J]. Optical Engineering, 58, 1.

    [9] SHARMA S, NYSTEN J, LASSILA A et al. Phase-stepping interferometry for parallelism measurement of step gauge faces[J]. Metrologia, 60(2023).

    [10] 张立颖. 平行度检测仪的分析及研究[D], 1-28(2006).

         ZHANG L Y. Analysis and Research on Parallelism Detector[D], 1-28(2006).

    [11] QU W D, LEI P, XUE T et al. Realization of large-aperture collimator to measure of optical axis parallelism[J]. Chinese Journal of Scientific Instrument, 27, 1528-1529(2006).

         曲卫东, 雷萍, 薛挺. 大口径平行光管用于光轴平行度测量的实现[J]. 仪器仪表学报, 27, 1528-1529(2006).

    [12] 古万煜, 史铿鸿, 王紫薇. 基于彩色图像合成的互补线移条纹高动态范围三维测量[J]. 光学 精密工程, 32, 3288-3299(2024).

         GU W Y, SHI K H, WANG Z W et al. High dynamic range 3D measurement with complementary line-shifting strips based on color image synthesis[J]. Opt. Precision Eng., 32, 3288-3299(2024).

    [13] KANG L Q, YANG P C, LÜ Q J et al. Wrapping phase repair method based on Tsallis Relative Entropy evaluation[J]. Opt. Precision Eng., 32, 1130-1139(2024).

         康乐谦, 杨鹏程, 吕秋娟. Tsallis相对熵引导的包裹相位修补[J]. 光学 精密工程, 32, 1130-1139(2024).

    [14] LIN W, JIA H Z. Parallelism detection of parallel flat[J]. Optical Instruments, 38, 16(2016).

         林旺, 贾宏志. 平行平板平行度的检测[J]. 光学仪器, 38, 16(2016).

    [15] KEROBYAN M, GYULASARYAN A, SOGHOMONYAN S et al. An interference method for measuring parallelism of miniature optical components[J]. Journal of Modern Optics, 60, 808-813(2013).

    [16] LIN S T, YEH S L, TRINH X H. Low-coherence phase-shifting shearing interferometer for measuring parallelism of parallel surfaces of transparent samples[J]. Optics & Laser Technology, 127, 106155(2020).

    [17] LAN B, FENG G Y, ZHANG T et al. A single-element interferometer for measuring parallelism and uniformity of transparent plate[J]. Acta Physica Sinica, 66, 355-364(2017).

         兰斌, 冯国英, 张涛. 用于透明平板平行度和均匀性测量的单元件干涉仪[J]. 物理学报, 66, 355-364(2017).

    [18] WANG Y, WANG L C, ZHENG Y F et al. Aurora image segmentation method based on region growing[J]. Computer Engineering and Applications, 52, 190-195, 212(2016).

         王妍, 王履程, 郑玉甫. 基于区域生长的极光图像分割方法[J]. 计算机工程与应用, 52, 190-195, 212(2016).

    [19] WANG F B, LIU H F, WANG R et al. Sub-pixel adaptive center extraction of line structured light stripe[J]. Laser Technology, 45, 350-356(2021).

         王福斌, 刘贺飞, 王蕊. 线结构光条纹中心亚像素自适应提取算法[J]. 激光技术, 45, 350-356(2021).

    [20] 周战荣, 张清华, 王莲芬. 干涉条纹边缘检测方法的比较与改进[J]. 光学技术, 33, 133-134(2007).

         ZHOU Z R, ZHANG Q H, WANG L F et al. Improvement and comparison of algorithms for interference fringe edge detection[J]. Optical Technique, 33, 133-134(2007).

    [21] 曲阳, 曹显莹, 孙纪勃. 基于图像识别的干涉条纹计数方法研究[J]. 物理通报, 129-133, 136(2021).

         QU Y, CAO X Y, SUN J B. Research on interference fringe counting method based on image recognition[J]. Physics Bulletin, 2021, 129-133, 136.

    [22] YANG Q J, YANG S, WANG W X. Improved Sobel algorithm for optical interference displacement measurement[J]. Journal of Heilongjiang University of Science and Technology, 30, 183-186(2020).

         杨庆江, 杨硕, 王卫鑫. 光干涉位移测量的Sobel改进算法[J]. 黑龙江科技大学学报, 30, 183-186(2020).

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    Mingjun WANG, Yifan HUANG, Shijie LIU, Liangwei LI, Pengbo LI, Junda LI, Fulin WU, Xueke XU, Zhufeng SHAO. Parallelism measurement of flat glass based on an interferometric fringe region growth algorithm[J]. Optics and Precision Engineering, 2025, 33(10): 1515

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    Paper Information

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    Received: Jan. 16, 2025

    Accepted: --

    Published Online: Jul. 23, 2025

    The Author Email: Shijie LIU (shijieliu@siom.ac.cn)

    DOI:10.37188/OPE.20253310.1515

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