Parallelism measurement of flat glass based on an interferometric fringe region growth algorithm

Mingjun WANG; Yifan HUANG; Shijie LIU; Liangwei LI; Pengbo LI; Junda LI; Fulin WU; Xueke XU; Zhufeng SHAO

doi:10.37188/OPE.20253310.1515

Optics and Precision Engineering, Volume. 33, Issue 10, 1515(2025)

Parallelism measurement of flat glass based on an interferometric fringe region growth algorithm

Mingjun WANG¹, Yifan HUANG^1,3, Shijie LIU^2、*, Liangwei LI^1,3, Pengbo LI^1,3, Junda LI^1,3, Fulin WU³, Xueke XU³, and Zhufeng SHAO⁴

Author Affiliations

¹School of Automation and Information Engineering， Xi'an University of Technology， Xi'an70048， China

²Precision Optical Manufacturing and Testing Center， Shanghai Institute of Optics Fine Machanics， Chinese Academy of Sciences， Shanghai01800， China

³Hengmai Optical Precision Machinery （Hangzhou） Co. Ltd， Hangzhou11421， China

⁴China Academy of Building Materials Science， Beijing10002， China

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Figures & Tables(10)

Fig. 1. Schematic diagram of the fizeau interferomete

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Fig. 2. Interference fringe image

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Fig. 3. Parallelism detection process

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Fig. 4. Comparison of region-growing algorithm and Sobel algorithm

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Fig. 5. Comparison between the region growing algorithm and Sobel's algorithm under different noises

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Fig. 6. Diagram of the experimental setup for detecting parallelism by Fischer-type interferometer

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Fig. 7. Region-growing measurement results

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Fig. 8. ZYGO measurement results

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Fig. 9. Different types of fringes

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Table 1. Comparison of the proposed algorithm results with ZYGO results for different fringe densities

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Table 1. Comparison of the proposed algorithm results with ZYGO results for different fringe densities

Fringe types	Measured object's aperture D/mm	Number of interference fringes within the measurement aperture m/ Strip	Proposed algorithm $θ /^{″}$	ZYGO interferometer $θ /^{″}$	Error $θ /^{″}$	Percentage error
（a）	27	5	7.951	8.255	0.304	0.037
（b）	45	1	0.954	0.882	0.072	0.082
（c）	65	23	15.193	14.672	0.521	0.036
（d）	75	109	62.400	62.841	0.441	0.007
（d）	45	66	62.972	62.841	0.131	0.002
（e）	80	9	4.830	4.530	0.300	0.066
（e）	45	5	4.771	4.530	0.241	0.053

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Mingjun WANG, Yifan HUANG, Shijie LIU, Liangwei LI, Pengbo LI, Junda LI, Fulin WU, Xueke XU, Zhufeng SHAO. Parallelism measurement of flat glass based on an interferometric fringe region growth algorithm[J]. Optics and Precision Engineering, 2025, 33(10): 1515

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Paper Information

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Received: Jan. 16, 2025

Accepted: --

Published Online: Jul. 23, 2025

The Author Email: Shijie LIU (shijieliu@siom.ac.cn)

DOI:10.37188/OPE.20253310.1515

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology