Optics and Precision Engineering, Volume. 33, Issue 10, 1515(2025)

Parallelism measurement of flat glass based on an interferometric fringe region growth algorithm

Mingjun WANG1, Yifan HUANG1,3, Shijie LIU2、*, Liangwei LI1,3, Pengbo LI1,3, Junda LI1,3, Fulin WU3, Xueke XU3, and Zhufeng SHAO4
Author Affiliations
  • 1School of Automation and Information Engineering, Xi'an University of Technology, Xi'an70048, China
  • 2Precision Optical Manufacturing and Testing Center, Shanghai Institute of Optics Fine Machanics, Chinese Academy of Sciences, Shanghai01800, China
  • 3Hengmai Optical Precision Machinery (Hangzhou) Co. Ltd, Hangzhou11421, China
  • 4China Academy of Building Materials Science, Beijing10002, China
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    In order to achieve high-precision and fast measurement of parallelism of flat glass, a new measurement method using an area growth algorithm to segment the interference fringe map was proposed. A Fischer interferometer was used to collect the self-interference fringes generated by reflections from the front and back surfaces of the flat glass, and an area growth algorithm was used to segment the collected self-interference fringes, extract the self-interference fringes, and statistically count the number of interfering fringes within the measurement aperture, so as to realize the measurement of the degree of parallelism. After comparing the region growing algorithm with the Sobel algorithm, it was found that the region growing algorithm performed better in the extraction of interference fringes. Measurements of different types of interference fringes using this algorithm and comparisons of the measurement results with those of ZYGO showed that the error of parallelism measurement based on the region growing algorithm was less than 1.Using this interferometric method of image processing, the parallelism of flat glass can be measured easily and quickly, which improves the inspection efficiency of flat glass, and at the same time has a high measurement accuracy.

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    Mingjun WANG, Yifan HUANG, Shijie LIU, Liangwei LI, Pengbo LI, Junda LI, Fulin WU, Xueke XU, Zhufeng SHAO. Parallelism measurement of flat glass based on an interferometric fringe region growth algorithm[J]. Optics and Precision Engineering, 2025, 33(10): 1515

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    Paper Information

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    Received: Jan. 16, 2025

    Accepted: --

    Published Online: Jul. 23, 2025

    The Author Email: Shijie LIU (shijieliu@siom.ac.cn)

    DOI:10.37188/OPE.20253310.1515

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