Fig. 1. Schematic diagram of the fabrication of the SiC grating structures.

Fig. 2. Cross-section SEM images of the LISC zone (a) before and (b) after chemical-selective etching.

Fig. 3. SiC grating structures from (a) top view and (b) side view under a 20× microscope.

Fig. 4. (a) SiC grating structures with a 1.07 μm period observed under a microscope with 100× magnification. (b) Diffraction pattern of SiC grating structures captured by a camera.