Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

Bo Gao; Tao Chen; Vanthanh Khuat; Jinhai Si; Xun Hou

doi:10.3788/COL201614.021407

Chinese Optics Letters, Volume. 14, Issue 2, 021407(2016)

Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching

Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si^*, and Xun Hou

Key Laboratory for Physical Electronics and Devices of the Ministry of Education, Shaanxi Key Lab of Information Photonic Technique, School of Electronics & Information Engineering, Xi’an Jiaotong University, Xi’an 710049, China

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Bo Gao, Tao Chen, Vanthanh Khuat, Jinhai Si, Xun Hou, "Fabrication of grating structures on silicon carbide by femtosecond laser irradiation and wet etching," Chin. Opt. Lett. 14, 021407 (2016)

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Paper Information

Category: Lasers and Laser Optics

Received: Oct. 11, 2015

Accepted: Dec. 11, 2015

Published Online: Sep. 21, 2018

The Author Email: Jinhai Si (jinhaisi@mail.xjtu.edu.cn)

DOI:10.3788/COL201614.021407

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology