Drilling high aspect ratio holes by femtosecond laser filament with aberrations

Manshi WANG; Zhiqiang YU; Nan ZHANG; Weiwei LIU

doi:10.1007/s12200-021-1214-4

Frontiers of Optoelectronics, Volume. 14, Issue 4, 522(2021)

Drilling high aspect ratio holes by femtosecond laser filament with aberrations

Manshi WANG, Zhiqiang YU, Nan ZHANG^*, and Weiwei LIU

Institute of Modern Optics, Nankai University, Tianjin Key Laboratory of Micro-scale Optical Information Science and Technology, Tianjin 300350, China

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Manshi WANG, Zhiqiang YU, Nan ZHANG, Weiwei LIU. Drilling high aspect ratio holes by femtosecond laser filament with aberrations[J]. Frontiers of Optoelectronics, 2021, 14(4): 522

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Paper Information

Category: RESEARCH ARTICLE

Received: Feb. 26, 2021

Accepted: Apr. 29, 2021

Published Online: Jan. 10, 2022

The Author Email: Nan ZHANG (zhangn@nankai.edu.cn)

DOI:10.1007/s12200-021-1214-4

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology