Journals Articles Conferences News About CLP
Submit a paper Email Alert
Search
Search
Articles
Journals
News
Advanced Search
Top Searches
2D MaterialsTransformation opticsQuantum PhotonicsSmall lasersSemiconductor UV PhotonicsSupersymmetric microring laser arrays

Infrared and Laser Engineering, Volume. 44, Issue 8, 2389(2015)

High-speed focusing technique for lithography based on line scan CCD

Chen Changlong1,2、*, Di Chengliang1,2, Tang Xiaoping1, and Hu song1
Author Affiliations
  • 1[in Chinese]
  • 2[in Chinese]
    • show less
    AbstractGet PDF
    Figures&Tables (0)
    Equations (0)
    References (8)
    Tools
    Paper Information
    Topics
    Figures & Tables(0)
    Tools

    Get Citation

    Copy Citation Text

    Chen Changlong, Di Chengliang, Tang Xiaoping, Hu song. High-speed focusing technique for lithography based on line scan CCD[J]. Infrared and Laser Engineering, 2015, 44(8): 2389

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Set citation alerts for article
    Save article for my favorites
    Paper Information

    Category: 光电测量

    Received: Aug. 13, 2014

    Accepted: Sep. 18, 2014

    Published Online: Jan. 26, 2016

    The Author Email: Changlong Chen (chenchanglong2013@163.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology