Acta Optica Sinica, Volume. 28, Issue 9, 1730(2008)

Research of Linewidth Stabilizing Method During Defocusing Laser Direct Writing

Jin Zhanlei*, Tan Jiubin, Zhang Shan, and Wang Lei
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    References(16)

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    CLP Journals

    [1] Li Ke, Shi Peng, Zhang Xiaobo, Wang Shengbo, Huang Kun, Li Yongping. Design and Preparation of Diffraction Optical Element in Dual Lens System[J]. Chinese Journal of Lasers, 2010, 37(8): 1972

    [2] Zong Yonghong, Zhou Changhe, Ma Jianyong, Wang Jin, Lu Yancong. Optimized Design of Leveling and Focusing Servo Control System[J]. Acta Optica Sinica, 2017, 37(1): 122001

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    Jin Zhanlei, Tan Jiubin, Zhang Shan, Wang Lei. Research of Linewidth Stabilizing Method During Defocusing Laser Direct Writing[J]. Acta Optica Sinica, 2008, 28(9): 1730

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    Paper Information

    Category: Integrated Optics

    Received: Oct. 26, 2007

    Accepted: --

    Published Online: Sep. 9, 2008

    The Author Email: Jin Zhanlei (jinzhanlei@hit.edu.cn)

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