Acta Optica Sinica, Volume. 28, Issue 9, 1730(2008)
Research of Linewidth Stabilizing Method During Defocusing Laser Direct Writing
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Jin Zhanlei, Tan Jiubin, Zhang Shan, Wang Lei. Research of Linewidth Stabilizing Method During Defocusing Laser Direct Writing[J]. Acta Optica Sinica, 2008, 28(9): 1730
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