Error analysis of precision scanning system for measuring reflectivity of large-aperture optical elements

Biao ZHANG; Jinyu ZHANG; Xiao JI; Yuanyuan DUAN; Lei WU; Gaoping LI; Dongyu YU; Wanhong YIN

doi:10.5768/JAO202344.0203003

Journal of Applied Optics, Volume. 44, Issue 2, 380(2023)

Error analysis of precision scanning system for measuring reflectivity of large-aperture optical elements

Biao ZHANG^1、*, Jinyu ZHANG², Xiao JI¹, Yuanyuan DUAN¹, Lei WU¹, Gaoping LI¹, Dongyu YU¹, and Wanhong YIN¹

¹The First Scale Optical Metrology Station of the Science, Technology and Industry for National Defense, Xi'an Institute of Applied Optics, Xi'an 710065, China

²College of Optical and Electronic Science Technology, China Jiliang University, Hangzhou 310018, China

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References(2)

[1] [1] International Organization for Standardization. Measurement of reflectance of plane surfaces and transmittance of plans parallel elements: ISO 15368 [S]. Switzerland: Information Handlng Services, 2001.

[7] [7] SUN Fuge, DAI Dongxu, XIE Jinchun, et al. Accurate measurement of reflectivity of high mirror by cavity ring-down spectroscopy [J]. Chinese journal of lasers, 1999, 26 (1) : 35-38.

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Biao ZHANG, Jinyu ZHANG, Xiao JI, Yuanyuan DUAN, Lei WU, Gaoping LI, Dongyu YU, Wanhong YIN. Error analysis of precision scanning system for measuring reflectivity of large-aperture optical elements[J]. Journal of Applied Optics, 2023, 44(2): 380

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Paper Information

Category: Research Articles

Received: Jun. 6, 2022

Accepted: --

Published Online: Apr. 14, 2023

The Author Email:

DOI:10.5768/JAO202344.0203003

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology