Error analysis of precision scanning system for measuring reflectivity of large-aperture optical elements

Biao ZHANG; Jinyu ZHANG; Xiao JI; Yuanyuan DUAN; Lei WU; Gaoping LI; Dongyu YU; Wanhong YIN

doi:10.5768/JAO202344.0203003

Journal of Applied Optics, Volume. 44, Issue 2, 380(2023)

Error analysis of precision scanning system for measuring reflectivity of large-aperture optical elements

Biao ZHANG^1、*, Jinyu ZHANG², Xiao JI¹, Yuanyuan DUAN¹, Lei WU¹, Gaoping LI¹, Dongyu YU¹, and Wanhong YIN¹

¹The First Scale Optical Metrology Station of the Science, Technology and Industry for National Defense, Xi'an Institute of Applied Optics, Xi'an 710065, China

²College of Optical and Electronic Science Technology, China Jiliang University, Hangzhou 310018, China

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Figures & Tables(7)

Fig. 1. Schematic diagram of measurement for pulse cavity ring-down method

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Fig. 2. Schematic diagram of folding ring-down cavity

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Fig. 3. Test system of cavity ring-down method

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Fig. 4. Structure diagram of precision scanning system for large-aperture optical element

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Fig. 5. Schematic diagram of optical deviation

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Fig. 6. Fitting curve of first-order exponential function

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Table 1. Cavity ring-down time and corresponding reflectivities
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Table 1. Cavity ring-down time and corresponding reflectivities
实验次数 1 2 3 4 5 6
τ 18.018 18.012 18.083 17.992 18.126 18.051
R 0.999 815 0.999 814 0.999 815 0.999 817 0.999 816 0.999 815

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Biao ZHANG, Jinyu ZHANG, Xiao JI, Yuanyuan DUAN, Lei WU, Gaoping LI, Dongyu YU, Wanhong YIN. Error analysis of precision scanning system for measuring reflectivity of large-aperture optical elements[J]. Journal of Applied Optics, 2023, 44(2): 380

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