Chinese Optics Letters, Volume. 9, Issue 10, 101202(2011)

Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution

Chen-Tai Tan, Yuan-Sheng Chan, Jhao-An Chen, Teh-Chao Liao, and Ming-Hung Chiu
Author Affiliations
  • Department of Electro-Optical Engineering, National Formosa University, No. 64, Wunhua Road, Huwei, Yunlin 632, China
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    CLP Journals

    [1] Long Li, Zhiyan Pan, Haoyang Cui, Jiaorong Liu, Shenchen Yang, Lilan Liu, Yingzhong Tian, Wenbin Wang, "Adaptive window iteration algorithm for enhancing 3D shape recovery from image focus," Chin. Opt. Lett. 17, 061001 (2019)

    [2] Fan Wang, Hailiang Lu, Qingyun Zhang, Anatoly Burov, "Novel technique for characterizing feature profiles in photolithography process," Chin. Opt. Lett. 10, 061202 (2012)