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Chinese Optics Letters, Volume. 9, Issue 10, 101202(2011)

Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution

Chen-Tai Tan, Yuan-Sheng Chan, Jhao-An Chen, Teh-Chao Liao, and Ming-Hung Chiu
Author Affiliations
  • Department of Electro-Optical Engineering, National Formosa University, No. 64, Wunhua Road, Huwei, Yunlin 632, China
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    Article index updated: Aug. 8, 2023

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    Chen-Tai Tan, Yuan-Sheng Chan, Jhao-An Chen, Teh-Chao Liao, Ming-Hung Chiu, "Non-scanning, non-interferometric, three-dimensional optical prof ilometer with nanometer resolution," Chin. Opt. Lett. 9, 101202 (2011)

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    Paper Information

    Category: Instrumentation, measurement, and metrology

    Received: Mar. 14, 2011

    Accepted: Apr. 28, 2011

    Published Online: Aug. 8, 2011

    The Author Email:

    DOI:10.3788/col201109.101202

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology