Chinese Journal of Lasers, Volume. 37, Issue 10, 2582(2010)
Optical Circuit Integrated Method of Single-Frequency Polarization Laser Interferometer for Nanometer Measurement
[1] [1] G. I. Dolgikh, M. N. Dubrov, S. G. Dolgikh et al.. Application of laser strainmeters to the study of earthquake physics[J]. Acta Geophysica, 2006, 54(2): 187~197
[2] [2] A. Abramovici, W. E. Althouse, R. W. P. Drever et al.. LIGO:The laser interferometer gravitational-wave observatory[J]. Science, 1992, 256(5055): 325~333
[5] [5] P. Ken, P. Balling. Common path two-wavelength homodyne counting interferometer development [J]. Meas. Sci. Technol., 2009, 20(8): 084009
[7] [7] L. Jongpil, W. Semyung, K. Kyoungsuk et al.. High-speed FM demodulator of a homodyne laser interferometer for measuring mechanical[J].Opt. Eng., 2004, 43(6): 1341~1349
[8] [8] Wu Kang, Ye Xiongying, Liu Litao et al.. Interferometric detection method for micro-displacement based on integrated diffraction grating[J]. Nanotechnology and Precision Engineering, 2009, 7(1): 56~59
[10] [10] Liao Yanbiao. Polarization Optics[M]. Beijing : Science Press, 2003
[11] [11] C. M. Wu, C. S. Su. Nonlinearity in measurements of length by optical interferometry[J]. Meas. Sci. Technol., 1996, 7(1): 62~68
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Liu Binbin, Li Liyan, Yang Jun, Yuan Libo. Optical Circuit Integrated Method of Single-Frequency Polarization Laser Interferometer for Nanometer Measurement[J]. Chinese Journal of Lasers, 2010, 37(10): 2582
Category: measurement and metrology
Received: Jan. 27, 2010
Accepted: --
Published Online: Sep. 25, 2010
The Author Email: Binbin Liu (liubin1982@126.com)