Chinese Journal of Lasers, Volume. 37, Issue 10, 2582(2010)

Optical Circuit Integrated Method of Single-Frequency Polarization Laser Interferometer for Nanometer Measurement

Liu Binbin*, Li Liyan, Yang Jun, and Yuan Libo
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    CLP Journals

    [1] Li Liyan, Wang Jian, Han Chunyang, Yuan Yonggui, Wu Bing, Yang Jun, Yuan Libo. Integration Single-Frequency Laser Interferometer Used to Nanometer Measurement[J]. Chinese Journal of Lasers, 2011, 38(4): 408001

    [2] Li Liyan, Wu Bing, Yuan Yonggui, Wei Yong, Yang Jun, Yuan Libo. Research on Nonlinear Error Compensation Method for Single-Frequency Laser Interferometer[J]. Acta Optica Sinica, 2011, 31(7): 726003

    [3] Zou Zhaowei, Cheng Xuewu, Yang Yong, Gong Wei. Application of Dual-Peak-Transmission Sodium FADOF in Solar Velocity Field Observation[J]. Acta Optica Sinica, 2012, 32(5): 523002

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    Liu Binbin, Li Liyan, Yang Jun, Yuan Libo. Optical Circuit Integrated Method of Single-Frequency Polarization Laser Interferometer for Nanometer Measurement[J]. Chinese Journal of Lasers, 2010, 37(10): 2582

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    Paper Information

    Category: measurement and metrology

    Received: Jan. 27, 2010

    Accepted: --

    Published Online: Sep. 25, 2010

    The Author Email: Binbin Liu (liubin1982@126.com)

    DOI:10.3788/cjl20103710.2582

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