Chinese Journal of Lasers, Volume. 37, Issue 10, 2582(2010)
Optical Circuit Integrated Method of Single-Frequency Polarization Laser Interferometer for Nanometer Measurement
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Liu Binbin, Li Liyan, Yang Jun, Yuan Libo. Optical Circuit Integrated Method of Single-Frequency Polarization Laser Interferometer for Nanometer Measurement[J]. Chinese Journal of Lasers, 2010, 37(10): 2582
Paper Information
Category: measurement and metrology
Received: Jan. 27, 2010
Accepted: --
Published Online: Sep. 25, 2010
The Author Email: Binbin Liu (liubin1982@126.com)
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