A kind of orthogonal polarized laser interferometer (OPLI) optical components position fixed and performance detection methods are proposed which can be used for optical circuit integrated of sub-nanometer precision interferometer and its capability detection. OPLI integration technique and its performance on on-line detective and evaluation method are built. Based on polarization intensity detection method, on-line optical detective and its evaluation system are constructed, and four channels polarized interference stripe quality and orthogonal polarized interference Lissajous trajectory′s ellipse parameter are detected, then nanometer precision interferometer optical component integration is realized. Experiment on stability and micro-vibration measurement is carried out to compare integrated and distributed OPLI performance. The experiment results indicated that the integrated OPLI is more stable than distributed OPLI and its signal to noise ratio (SNR) is 10 dB higher than distributed OPLI, its accuracy reached 10 pm/Hz at micro-vibration measurement experiment.