[3] [3] Wei Hongbo, Li Lifeng. All-dielectric reflection gratings: a study of physical mechanism for achieving high-efficiency. Appl. Opt., 2003, 42(31): 6255～6260

[8] [8] Li L, Xu M, Stegeman G I et al.. Fabrication of photoresist masks for submicrometer surface relief gratings. Proc. SPIE, 1987, 835:72～82

[9] [9] Britten J A, Boyd R D, Shore B W. In-situ end-point detection during development of submicrometer grating structures in photoresist. Opt. Engng., 1995, 34(2):474～479

[10] [10] KAPPA is a grating simulation software written by Li Lifeng one of the authors