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Acta Optica Sinica, Volume. 24, Issue 9, 1285(2004)

Method for Controlling Groove Depth and Duty Cycle of Rectangular Photoresist Gratings

[in Chinese]1、*, [in Chinese]1, and [in Chinese]2
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  • 2[in Chinese]
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    [in Chinese], [in Chinese], [in Chinese]. Method for Controlling Groove Depth and Duty Cycle of Rectangular Photoresist Gratings[J]. Acta Optica Sinica, 2004, 24(9): 1285

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    Paper Information

    Category: Physical Optics

    Received: Jun. 23, 2003

    Accepted: --

    Published Online: Jun. 12, 2006

    The Author Email: (zhaojinsong@tsinghua.org.cn)

    DOI:

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology