Acta Optica Sinica, Volume. 26, Issue 7, 1032(2006)
Precompensation for Nonlinear Distortion in Thick Film Photolithography
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[in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Precompensation for Nonlinear Distortion in Thick Film Photolithography[J]. Acta Optica Sinica, 2006, 26(7): 1032