Chinese Journal of Lasers, Volume. 48, Issue 15, 1502003(2021)

Recent Progress in Laser-Processed Graphene for Sensors and Actuators

Yuqing Liu1, Jiarui Zhang2, Dongdong Han2, and Hongbo Sun1、*
Author Affiliations
  • 1State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
  • 2State Key Laboratory of Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, Changchun, Jilin 130012, China
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    Figures & Tables(9)
    Preparation process and optical microscopy images of patterned reduced GO films[36]. (a) Illustration of procedure of LRGO microcircuit; optical microscopy images of curvilinear microcircuits (b) MC-1 and (c) MC-2, (d) comb-like microcircuit MC-3, and (e) the badge of Jilin University
    Patterned reduction of graphene oxide by laser-scribed technology[41]. (a) Illustration of preparative procedure of laser-scribed RGO (LsrGO) /PE bilayer film; (b) various programmable circuit patterns; (c) C1s XPS spectra of LsrGO; (d) Raman spectra of GO and LsrGO; (e) current-voltage relationships of the GO and LsrGO
    LIG formed from commercial PI films using a CO2 laser[42]. (a) Schematic of the fabrication process of LIG from PI; (b) SEM image of LIG patterned into an owl shape; (c) SEM image of LIG film circled in Fig. 3(b), the inset is the corresponding higher magnification SEM image; (d) cross-sectional SEM image of the LIG film on the PI substrate, the inset is the SEM image showing the porous morphology of LIG; (e) Raman spectra of a LIG film and a PI film; (f) XRD of powdered LIG scraped from the PI film
    Experimental illustration and the obtained laser-induced graphene[49-50]. (a) Schematic of wood-derived graphene via laser induction; (b) a photo of LIG patterned into a letter R on pine wood; (c) SEM image of pristine wood; (d) SEM image of pine-derived LIG, inset shows the cross-section image; (e) photos of LIG patterned on coconut, bread, and cloth
    Femtosecond laser cutting of CVD-grown graphene[54]. (a) Cutting of pristine few layer graphene sheet to fabricate patterned structures by femtosecond laser; (b) SEM image of large area patterned graphene film by femtosecond laser; (c) SEM image of clear cut line of the graphene and width of the graphene microribbon is 5 μm
    An epidermal electronic skin that can act as a strain sensor[23]. (a) Illustration of the fabrication of graphene strain sensor; (b) detection of finger bending, respiration, and pulse by strain sensor
    Laser-reduced RGO/GO Janus membrane for humidity sensing[29]. (a) Schematic of the fabrication process of RGO/GO actuator; (b) the RGO/GO actuator responds to humidity; (c) the RGO/GO multiresponsive actuator and its applications
    Photothermal actuators based on Marangoni effect[30]. (a) Schematic of patterned LIG tape as photothermal label for fabricating Marangoni actuator; (b) directional and rotation motion of the LIG labeled leaf actuator
    LIG-based soft electrothermal actuators[73]. (a) Schematic of the fabrication of the LIG-based electrothermal actuator; (b) optical images of various electrothermal actuator models; (c) a biomimetic frog tongue which can prey insects
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    Yuqing Liu, Jiarui Zhang, Dongdong Han, Hongbo Sun. Recent Progress in Laser-Processed Graphene for Sensors and Actuators[J]. Chinese Journal of Lasers, 2021, 48(15): 1502003

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    Paper Information

    Category: laser manufacturing

    Received: Mar. 17, 2021

    Accepted: May. 24, 2021

    Published Online: Aug. 5, 2021

    The Author Email: Hongbo Sun (hbsun@tsinghua.edu.cn)

    DOI:10.3788/CJL202148.1502003

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