Fig. 1. Schematic of the atmospheric plasma machine

Fig. 2. Schematic of sample etching. (a) Plasma etching; (b) hydrofluoric acid etching

Fig. 3. Surface morphology of sample etched by plasma and then hydrofluoric acid

Fig. 4. Full spectra of elements of surface topography of sample etched by plasma and then hydrofluoric acid

Fig. 5. C narrow spectra of surface topography of sample etched by plasma

Fig. 6. Scanning electron microscope (SEM) picture of surface topography of sample. (a) Initial surface topography before etching; (b) surface morphology etching by plasma; (c) surface morphology etching by plasma and then hydrofluoric acid

Fig. 7. Surface morphology of fused silica under SEM (50000× magnification)

Fig. 8. Schematic of a wall reflection model based on micro-mask and distribution of etched particle quantity. (a) Schematic of a wall reflection model based on micro-mask; (b) quantity distribution of etching particles at different reference heights in the horizontal direction

Fig. 9. SEM image of gold nanoparticles

Fig. 10. Cross sectional view of gold nanoparticles on surface of the component under atmospheric plasma etching