Fig. 1. Schematic diagram of extreme ultraviolet reflectometer

Fig. 2. Single pulse energy of focused beam versus electric pulse energy

Fig. 3. Spectral response of detector. (a) AXUV100G; (b) SXUV100^[20-21]

Fig. 4. Spectral response of two detectors as a function of injected electrical pulse energy from the light source

Fig. 5. Schematic diagram of normalization

Fig. 6. Variation curves of reference and experimental beam energy decay over time

Fig. 7. Reflectivity measurement curves of Mo/Si multilayer mirror. (a) Reflectivity-angle curves before normalization; (b) reflectivity-angle curves after normalization