Process Study and Quality Analysis of Picosecond‐Laser Air‐Film Hole Processing

Xue Fan; Zihui Dong; Qingwei Zhang; Nan Li; Shanglu Yang

doi:10.3788/CJL240991

Chinese Journal of Lasers, Volume. 52, Issue 4, 0402402(2025)

Process Study and Quality Analysis of Picosecond‐Laser Air‐Film Hole Processing

Xue Fan^1,2, Zihui Dong^1,3,4, Qingwei Zhang¹, Nan Li¹, and Shanglu Yang^1、*

¹Center of Laser Intelligent Manufacturing Technology Research and Development, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China

²Center of Materials Science and Optoelectronic Engineering, University of Chinese Academy of Sciences, Beijing 100049, China

³University of Leicester, Leicester LE1 7RH, United Kingdom

⁴Wenzhou University, Wenzhou 325035, Zhejiang , China

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Xue Fan, Zihui Dong, Qingwei Zhang, Nan Li, Shanglu Yang. Process Study and Quality Analysis of Picosecond‐Laser Air‐Film Hole Processing[J]. Chinese Journal of Lasers, 2025, 52(4): 0402402

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Paper Information

Category: Laser Micro-Nano Manufacturing

Received: Jun. 21, 2024

Accepted: Aug. 14, 2024

Published Online: Jan. 20, 2025

The Author Email: Shanglu Yang (yangshanglu@siom.ac.cn)

DOI:10.3788/CJL240991

CSTR:32183.14.CJL240991

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology