Optics and Precision Engineering, Volume. 21, Issue 5, 1116(2013)
Self-correction of phase step error in phase shifting interferometric measurement
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ZHAO Zhi-liang, XIA Bo-cai, CHEN Li-hua, ZHANG Zhi-hua, ZHENG Wan-guo. Self-correction of phase step error in phase shifting interferometric measurement[J]. Optics and Precision Engineering, 2013, 21(5): 1116
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Received: Dec. 13, 2012
Accepted: --
Published Online: May. 31, 2013
The Author Email: ZHAO Zhi-liang (zzl_caep@163.com)