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Optics and Precision Engineering, Volume. 21, Issue 5, 1116(2013)

Self-correction of phase step error in phase shifting interferometric measurement

ZHAO Zhi-liang1,2、*, XIA Bo-cai3, CHEN Li-hua1, ZHANG Zhi-hua2, and ZHENG Wan-guo1
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  • 1[in Chinese]
  • 2[in Chinese]
  • 3[in Chinese]
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    ZHAO Zhi-liang, XIA Bo-cai, CHEN Li-hua, ZHANG Zhi-hua, ZHENG Wan-guo. Self-correction of phase step error in phase shifting interferometric measurement[J]. Optics and Precision Engineering, 2013, 21(5): 1116

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    Received: Dec. 13, 2012

    Accepted: --

    Published Online: May. 31, 2013

    The Author Email: ZHAO Zhi-liang (zzl_caep@163.com)

    DOI:10.3788/ope.20132105.1116

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology