Evaluation and calibration of the measurement characteristics of white light interference systems

Xiaoyu CAI; Junjie WU; Jiasi WEI

doi:10.3969/j.issn.1005-5630.202406170078

Optical Instruments, Volume. 47, Issue 3, 44(2025)

Evaluation and calibration of the measurement characteristics of white light interference systems

Xiaoyu CAI, Junjie WU, and Jiasi WEI^*

Key Laboratory of Bioanalysis and Metrology for State Market Regulation, Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China

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References(7)

[1] DE GROOT P, DECK L. Surface profiling by analysis of white-light interferograms in the spatial frequency domain[J]. Journal of Modern Optics, 42, 389-401(1995).

[2] SCHMIT J, OLSZAK A. High-precision shape measurement by white-light interferometry with real-time scanner error correction[J]. Applied Optics, 41, 5943-5950(2002).

[3] DECK L, DE GROOT P. High-speed noncontact profiler based on scanning white-light interferometry[J]. Applied Optics, 33, 7334-7338(1994).

[5] [5] WANG S Z, XIE T B, CHANG S P. Vertical scanning white light interfering profilometer based on Linnik interference microscope[C]Proceedings of SPIE 7656, 5th International Symposium on Advanced Optical Manufacturing Testing Technologies: Optical Test Measurement Technology Equipmen. Dalian: SPIE, 2010: 76563I.

[9] KINO G S, CHIM S S C. Mirau correlation microscope[J]. Applied Optics, 29, 3775-3783(1990).

[12] WEI J S, SUN K X, CAI X Y. Calibration of WLI lateral indication error with 2D micro/nano pitch standard[J]. Journal of Physics: Conference Series, 1732, 012138(2021).

[15] [15] Consultative Committee f Length. CCL strategy document 2018 − 2028[R]. Paris: BIPM, 2018.

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Xiaoyu CAI, Junjie WU, Jiasi WEI. Evaluation and calibration of the measurement characteristics of white light interference systems[J]. Optical Instruments, 2025, 47(3): 44

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Paper Information

Received: Jun. 17, 2024

Accepted: --

Published Online: Jul. 28, 2025

The Author Email: Jiasi WEI (weijs@simt.com.cn)

DOI:10.3969/j.issn.1005-5630.202406170078

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology