Acta Optica Sinica, Volume. 30, Issue 3, 907(2010)
Cleaning of Carbon Contamination on Si Wafer with Activated Oxygen by Synchrotron Radiation
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Zhou Hongjun, Zhong Pengfei, Huo Tonglin, Jiang Xinting, Zheng Jinjin. Cleaning of Carbon Contamination on Si Wafer with Activated Oxygen by Synchrotron Radiation[J]. Acta Optica Sinica, 2010, 30(3): 907
Paper Information
Category: X-Ray Optics
Received: Mar. 27, 2009
Accepted: --
Published Online: Mar. 11, 2010
The Author Email: Zhou Hongjun (hjzhou@ustc.edu.cn)
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