Researching | Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system

Chinese Optics Letters, Volume. 12, Issue 5, 053101(2014)

Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system

Jian Sun, Weili Zhang, Kui Yi, and Jianda Shao

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References (12)

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References(12)

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CLP Journals

[1] Chun Guo, Mingdong Kong, Wenyan He, "Optimization of the spectral performance of an antireflection coating on a micro-spherical substrate," Chin. Opt. Lett. 14, 093101 (2016)

Cited By

[1] Cheng Li, Shigeng Song, Des Gibson, David Child, Hin on Chu, Ewan Waddell. Modeling and validation of uniform large-area optical coating deposition on a rotating drum using microwave plasma reactive sputtering. Applied Optics, 56, C65(2017).

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Jian Sun, Weili Zhang, Kui Yi, Jianda Shao, "Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system," Chin. Opt. Lett. 12, 053101 (2014)

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Paper Information

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Received: Jan. 16, 2014

Accepted: Mar. 5, 2014

Published Online: May. 6, 2014

The Author Email:

DOI:10.3788/col201412.053101

Topics

laser devices and laser physics

Lasers and Laser Optics

laser manufacturing

Instrumentation, Measurement and Metrology