Chinese Optics Letters, Volume. 12, Issue 5, 053101(2014)
Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system
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Jian Sun, Weili Zhang, Kui Yi, Jianda Shao, "Optimization of thickness uniformity of coatings on spherical substrates using shadow masks in a planetary rotation system," Chin. Opt. Lett. 12, 053101 (2014)
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Received: Jan. 16, 2014
Accepted: Mar. 5, 2014
Published Online: May. 6, 2014
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