OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 23, Issue 3, 136(2025)

Deposition of Large-Sized Infrared Diamond-Like Carbon Coating Based on RF-PECVD

ZHANG Tian-xing1,2, LI Zhong1,2, XU Xu1,2, XUE Jun1,2, and XIONG Tao1,2
Author Affiliations
  • 1Huazhong Institute of Electro-Optics—Wuhan National Laboratory for Optoelectronics, Wuhan 430223, China
  • 2Hubei Jiuzhiyang Infrared System Co., Ltd., Wuhan 430223, China
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    References(7)

    [2] [2] Duminical F D, Belchi R, Libralesso L,et al. Investigation of Cr(N)/DLC multilayer coatings elabo-rated by PVD for high wear resistance and low friction applications[J]. Surface and Coatings Technology, 2018, 337(15): 396-403.

    [3] [3] Zihao Zhai, Honglie Shen, Jieyi Chen. Fast growth of conductive amorphous carbon films by HFCVD with filament temperature control[J]. Materials Letters, 2018, 228(5): 293-296.

    [4] [4] Bai L C, Zhang G A, Wu Z G,et al. Effect of different ion beam on properties of amorphous carbon film fabricated by ion beam sputtering deposition(IBSD)[J]. Nuclear Instruments and Methods in Physics Research B, 2011, 269(17): 1871-1877.

    [6] [6] Ankit Tyagi, R S Walia, Qasim Murtaza,et al. A critical review of diamond like carbon coating for wear resistance applications[J]. International Journal of Refractory Metals and Hard Materials, 2019,(78): 107-122.

    [7] [7] Hikaru Okubo, Chiharu Tadokoro, Taro Sumi,et al. Wear acceleration mechanism of diamond-like carbon(DLC)films lubricated with MoDTC solution: Roles of tribofilm formation and structural transformation in wear acceleration of DLC films lubricated with MoDTC solution[J]. Tribology International, 2019,(133): 271-287.

    [8] [8] Wang Y, Wang Y, Kang J, Ma G, Zhu L,et al. Tribological Properties of Ti-Doped Diamond Like C Coatings Under Boundary Lubrication with ZDDP[J]. Tribol. ASME., 2021, 143(9): 091901.

    [10] [10] Chaoqian Guo, Songsheng Lin,et al. Modulation of Si on microstructure and tribo-mechanical properties of hydrogen-free DLC films prepared by magnetron sputtering[J]. Journal Pre-proofs, 509(2020): 145381.

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    ZHANG Tian-xing, LI Zhong, XU Xu, XUE Jun, XIONG Tao. Deposition of Large-Sized Infrared Diamond-Like Carbon Coating Based on RF-PECVD[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2025, 23(3): 136

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    Paper Information

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    Received: Oct. 19, 2024

    Accepted: Jun. 24, 2025

    Published Online: Jun. 24, 2025

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