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OPTICS & OPTOELECTRONIC TECHNOLOGY, Volume. 23, Issue 3, 136(2025)

Deposition of Large-Sized Infrared Diamond-Like Carbon Coating Based on RF-PECVD

ZHANG Tian-xing1,2, LI Zhong1,2, XU Xu1,2, XUE Jun1,2, and XIONG Tao1,2
Author Affiliations
  • 1Huazhong Institute of Electro-Optics—Wuhan National Laboratory for Optoelectronics, Wuhan 430223, China
  • 2Hubei Jiuzhiyang Infrared System Co., Ltd., Wuhan 430223, China
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    ZHANG Tian-xing, LI Zhong, XU Xu, XUE Jun, XIONG Tao. Deposition of Large-Sized Infrared Diamond-Like Carbon Coating Based on RF-PECVD[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2025, 23(3): 136

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    Received: Oct. 19, 2024

    Accepted: Jun. 24, 2025

    Published Online: Jun. 24, 2025

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology