Acta Optica Sinica, Volume. 31, Issue 10, 1005002(2011)
Vector Analysis of Diffractive Optical Elements for Off-Axis Illumination of Projection Lithographic System
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Zhang Wei, Gong Yan. Vector Analysis of Diffractive Optical Elements for Off-Axis Illumination of Projection Lithographic System[J]. Acta Optica Sinica, 2011, 31(10): 1005002
Paper Information
Category: Diffraction and Gratings
Received: Apr. 19, 2011
Accepted: --
Published Online: Sep. 29, 2011
The Author Email: Wei Zhang (zhangw@sklao.ac.cn)
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