Chinese Journal of Lasers, Volume. 35, Issue 12, 2031(2008)

Influence of Substrate Temperature on the Properties of Tin-Doped Indium Oxide Thin Films Prepared by Direct Current Magnetron Sputtering

Zeng Weiqiang*, Yao Jianke, He Hongbo, and Shao Jianda
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    Zeng Weiqiang, Yao Jianke, He Hongbo, Shao Jianda. Influence of Substrate Temperature on the Properties of Tin-Doped Indium Oxide Thin Films Prepared by Direct Current Magnetron Sputtering[J]. Chinese Journal of Lasers, 2008, 35(12): 2031

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    Paper Information

    Category: materials and thin films

    Received: Jan. 10, 2008

    Accepted: --

    Published Online: Dec. 17, 2008

    The Author Email: Weiqiang Zeng (zwq286@gmail.com)

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