Chinese Journal of Lasers, Volume. 35, Issue 12, 2031(2008)
Influence of Substrate Temperature on the Properties of Tin-Doped Indium Oxide Thin Films Prepared by Direct Current Magnetron Sputtering
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Zeng Weiqiang, Yao Jianke, He Hongbo, Shao Jianda. Influence of Substrate Temperature on the Properties of Tin-Doped Indium Oxide Thin Films Prepared by Direct Current Magnetron Sputtering[J]. Chinese Journal of Lasers, 2008, 35(12): 2031