Impact of Non-ideal Illumination Pupil on Imaging Performance of Lithography

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CHEN An, LIN Wumei, JIANG Haibo. Impact of Non-ideal Illumination Pupil on Imaging Performance of Lithography[J]. Opto-Electronic Engineering, 2013, 40(2): 87

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Paper Information

Category:

Received: Jun. 21, 2012

Accepted: --

Published Online: Mar. 5, 2013

The Author Email: An CHEN (627555070@qq.com)

DOI:10.3969/j.issn.1003-501x.2013.02.014

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology