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Opto-Electronic Engineering, Volume. 40, Issue 2, 87(2013)

Impact of Non-ideal Illumination Pupil on Imaging Performance of Lithography

CHEN An1,2、*, LIN Wumei1, and JIANG Haibo1,2
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  • 1[in Chinese]
  • 2[in Chinese]
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    CHEN An, LIN Wumei, JIANG Haibo. Impact of Non-ideal Illumination Pupil on Imaging Performance of Lithography[J]. Opto-Electronic Engineering, 2013, 40(2): 87

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    Paper Information

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    Received: Jun. 21, 2012

    Accepted: --

    Published Online: Mar. 5, 2013

    The Author Email: An CHEN (627555070@qq.com)

    DOI:10.3969/j.issn.1003-501x.2013.02.014

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology