Acta Photonica Sinica, Volume. 54, Issue 1, 0111002(2025)

Development of Low Wavefront Distortion Dichroic Mirror for Super-resolution Imaging

Hongyu HUANG*... Ruisheng WANG, Xiaomin LIN, Xianpeng LIANG, Ming DONG and Quan YUAN |Show fewer author(s)
Author Affiliations
  • Shenyang Instrument Science Research Institute Co.,Ltd.,Shenyang 110043,China
  • show less
    References(15)

    [1] Aoni WEI, Chengbing QIN, Shuai DONG et al. Research progress of super-resolution fluorescence microscopy. Laser & Optoelectronics Progress, 60, 1106012(2023).

    [2] Gang WEN, Simin LI, Xibing YANG et al. Super-resolution fluorescence microscopy system by structured light illumination based on laser interference. Acta Optica Sinica, 37, 0318003(2017).

    [3] Xiangyu WANG, Xi CHEN, Tun CAO et al. Application of adaptive optics in super⁃resolution fluorescence microscopy. Chinese Journal of Lasers, 51, 0307104(2024).

    [7] Jiangchuan HU, Hongmei CAI, Songlin CHEN et al. Matching the residual stress between thin films for high reflective mirrors. Infrared and Laser Engineering, 40, 2447-2450(2011).

    [8] Baojian LIU, Weibo DUAN, Daqi LI et al. Effect of annealing temperature on structure and stress properties of Ta2O5/SiO2 multilayer reflective coatings. Acta Physica Sinica, 68, 172-178(2019).

    [9] Qipeng LV. Study on stress properties and stress deformation control of ta2o5/sio2 optical films deposited by ion beams puttering, 32-46(2019).

    [10] Yang LI, Junqi XU, Junhong SU et al. Residual stress and deformation of 1 064 nm high reflection films for laser systems. Surface Technology, 51, 311-318(2022).

    [11] W C WANG, P Y CHEN, Y T WU. Investigation of non-equibiaxial thin film stress by using stoney formula(2017).

    [12] Wenjia YUAN, Weidong SHEN, Xiaowen ZHENG et al. Optical and mechanical properties and microstructures of Nb2O5, Ta2O5 and SiO2 thin films prepared by ion beam sputtering. Acta Optica Sinica, 37, 1231001(2017).

    [13] J P MASSE, H SZYMANOWSKI, O ZABEIDA et al. Stability and effect of annealing on the optical properties of plasma-deposited Ta2O5 and Nb2O5 films. Thin Solid Films, 515, 1674-1682(2006).

    [14] Kun LI, Yanchun HE, Lanxi WANG et al. Effect of annealing temperature on optical properties and surface properties of Ta2O5 thin films. Vacuum and Cryogenics, 30, 78-82(2024).

    [15] Jinfa TANG, Peifu GU, Xu LIU. Modern optical thin film technology(2006).

    Tools

    Get Citation

    Copy Citation Text

    Hongyu HUANG, Ruisheng WANG, Xiaomin LIN, Xianpeng LIANG, Ming DONG, Quan YUAN. Development of Low Wavefront Distortion Dichroic Mirror for Super-resolution Imaging[J]. Acta Photonica Sinica, 2025, 54(1): 0111002

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category:

    Received: Jul. 22, 2024

    Accepted: Sep. 30, 2024

    Published Online: Mar. 5, 2025

    The Author Email: HUANG Hongyu (huanghongyu@hb-optical.com.cn)

    DOI:10.3788/gzxb20255401.0111002

    Topics