Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 520(2025)

Wafer-Level Packaging-Surface Acoustic Wave Process Based on Silicon Caps

SHU Ping1, MI Jia1, LEI Kai1, LIANG Liuhong1, LIN Canghai2, LENG Junlin1, and CHEN Xing1
Author Affiliations
  • 1The 26th Institute of China Electronics Technology Group Corporation,Chongqing 400060,China
  • 2Xiamen Sky Semiconductor Technology Co. Ltd.,Xiamen 361026,China
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    References(2)

    [2] [2] CHEN Zuohuan,ZHAO Jin,JIANG Feng,et al. 3D wafer level packaging for SAW filter using thin glass capping with through glass vias[C]//[S. l.]:2021 22nd International Conference on Electronic Packaging Technology(ICEPT),2021:1-4.

    [6] [6] ZOSCHKE K,WEGNER M,LOPPER C,et al. LiTaO3 capping technology for wafer level chip size packaging of SAW filters[C]//[S. l.]:2016 IEEE 66th Electronic Components and Technology Conference(ECTC),2016:889-896.

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    SHU Ping, MI Jia, LEI Kai, LIANG Liuhong, LIN Canghai, LENG Junlin, CHEN Xing. Wafer-Level Packaging-Surface Acoustic Wave Process Based on Silicon Caps[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 520

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    Paper Information

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    Received: Jan. 12, 2025

    Accepted: --

    Published Online: Jul. 11, 2025

    The Author Email:

    DOI:10.11977/j.issn.1004-2474.2025.03.018

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