Piezoelectrics & Acoustooptics, Volume. 47, Issue 3, 520(2025)
Wafer-Level Packaging-Surface Acoustic Wave Process Based on Silicon Caps
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SHU Ping, MI Jia, LEI Kai, LIANG Liuhong, LIN Canghai, LENG Junlin, CHEN Xing. Wafer-Level Packaging-Surface Acoustic Wave Process Based on Silicon Caps[J]. Piezoelectrics & Acoustooptics, 2025, 47(3): 520
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Received: Jan. 12, 2025
Accepted: --
Published Online: Jul. 11, 2025
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