Chinese Journal of Lasers, Volume. 36, Issue 5, 1200(2009)

Effect of Annealing on HfO2/SiO2, Y2O3/SiO2 Multilayer Thin Films

Yuan Jingmei*, He Hongbo, Yi Kui, Shao Jianda, and Fan Zhengxiu
Author Affiliations
  • [in Chinese]
  • show less
    References(14)

    [2] [2] Yawen Zhang, Shu Jin, Chunsheng Liao et al.. Microstructures and optical properties of nanocrystalline rare earth stabilized zirconia thin films deposited by a simple sol–gel method[J]. Materials Lett.,2002,56 (6): 1030~1034

    [3] [3] B.J. Pond, J.I. Debar, C.K. Carniglia.Stress reduction of ion-beam-sputtered mixed-oxide coatings by baking.[C]. SPIE , 1988,1775:311~319

    [4] [4] K.F. Ferris, M.R. Thompson, G.J. Exarhos et al.. Optical properties of metal-oxide thin films: influence of microstructure.[C].SPIE, 1988,1775 : 328~337

    [5] [5] D.G. McCulloch, A.R. Merchant. The effect of annealing on the structure of cathodic arc deposited amorphous carbon nitride films. [J].Thin Solid Films, 1996, 290–291:99~102

    [6] [6] A. Georgea, T. James, F.J. Kai et al.. Mechanical, optical and structural properties of TiO2 and MgF2 thin films deposited by plasma ion assisted deposition.[J].Thin Solid Films, 1999,342:83~92

    [7] [7] Yuanan Zhao, Yingjian Wang, Hui Gong et al.. Annealing effects on structure and laser-induced damage threshold of Ta2O5/SiO2 dielectric mirrors[J]. Applied Surface Science,2003,210(3~4):353~358

    [11] [11] David Smith, Philip Baumeister.Refractive index of some oxide and fluoride coating materials[J].Appl. Opt.,1979,18(1):111~115

    [13] [13] P.Baumeister, O.Arnon.Use of hafnium dioxide in multilayer dielectric reflectors for the near UV[J].Appl. Opt.,1977,16(2):439~444

    [14] [14] Shang Shuzhen,Shao Jianda,Shen Jian et al.. Effects of annealing on electron-beam evaporated 193 nm Al2O3/MgF2 HR mirrors[J].Acta Physica Sinica,2006,55(5):2639~2643

    CLP Journals

    [1] Lin Dawei, Guo Chun, Zhang Yundong, Li Bincheng. Preparation on Vacuum Ultraviolet Reflective Aluminum Films[J]. Acta Optica Sinica, 2012, 32(2): 231001

    Tools

    Get Citation

    Copy Citation Text

    Yuan Jingmei, He Hongbo, Yi Kui, Shao Jianda, Fan Zhengxiu. Effect of Annealing on HfO2/SiO2, Y2O3/SiO2 Multilayer Thin Films[J]. Chinese Journal of Lasers, 2009, 36(5): 1200

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: materials and thin films

    Received: Jul. 18, 2008

    Accepted: --

    Published Online: May. 22, 2009

    The Author Email: Jingmei Yuan (jmyuan@mail.siom.ac.cn)

    DOI:

    Topics