Chinese Journal of Lasers, Volume. 40, Issue 9, 907001(2013)

Realization of Antireflection Coatings for 193 nm P-Polarized Light at Large Angle

Li Chun1、*, Jin Chunshui1, Jin Jingcheng1,2, and Chang Yanhe1,2
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    Li Chun, Jin Chunshui, Jin Jingcheng, Chang Yanhe. Realization of Antireflection Coatings for 193 nm P-Polarized Light at Large Angle[J]. Chinese Journal of Lasers, 2013, 40(9): 907001

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    Paper Information

    Category: materials and thin films

    Received: Feb. 27, 2013

    Accepted: --

    Published Online: Aug. 27, 2013

    The Author Email: Chun Li (lifshu1012@aliyun.com)

    DOI:10.3788/cjl201340.0907001

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