Acta Photonica Sinica, Volume. 54, Issue 5, 0512001(2025)

Three-dimensional Shape Measurement Technology Based on Point Diffraction Interference

Shiyu ZHAO and Fen GAO*
Author Affiliations
  • School of Optoelectronic Engineering,Xi'an Technological University,Xi'an 710021,China
  • show less
    Figures & Tables(9)
    Point diffraction interference three-dimensional shape measurement optical schematic diagram
    Measurement system process
    Phase-height restoration model diagram
    Point diffraction interference three-dimensional shape measurement experimental system
    The measured object and the 7-step phase-shifting object interference images
    The three-dimensional shape measurement results of the system
    ATOS Compact Scan 3D scanner measurement results
    Radius fitting results
    • Table 1. The comparison of measurement results between this system and ATOS Compact Scan 3D scanner

      View table
      View in Article

      Table 1. The comparison of measurement results between this system and ATOS Compact Scan 3D scanner

      Serial numberh1/mmh2/mmνih1/mmνih2/mmσh1/mmσh2/mm
      119.279 319.280 1-0.000 80.000 20.001 30.000 2
      219.281 619.280 00.001 50.000 1
      319.280 719.280 00.000 60.000 1
      419.278 919.279 8-0.001 2-0.000 1
      519.281 219.280 10.001 10.000 2
      619.278 719.279 6-0.001 4-0.000 3
      h1¯=19.280 1h2¯=19.279 9
    Tools

    Get Citation

    Copy Citation Text

    Shiyu ZHAO, Fen GAO. Three-dimensional Shape Measurement Technology Based on Point Diffraction Interference[J]. Acta Photonica Sinica, 2025, 54(5): 0512001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: Oct. 18, 2024

    Accepted: Dec. 24, 2024

    Published Online: Jun. 18, 2025

    The Author Email: Fen GAO (gaofen8128@163.com)

    DOI:10.3788/gzxb20255405.0512001

    Topics