Acta Photonica Sinica, Volume. 54, Issue 5, 0512001(2025)
Three-dimensional Shape Measurement Technology Based on Point Diffraction Interference
Point diffraction interferometry is a method for the detection of super-precision surface shape of optical components. This method uses micron-scale hole diffraction to generate nearly ideal spherical wave as the reference surface, which gets rid of the reference mirror's limitation on the accuracy of traditional interferometry. If the interference technology based on point diffraction can be extended to the field of three-dimensional measurement, it will be expected to provide a new way for ultra-high precision three-dimensional measurement. In order to solve the problem of non-destructive measurement of three-dimensional topography of complex curved surfaces in small areas, a three-dimensional topography measurement method based on point diffraction interference technology is proposed. The high-precision point diffraction interference fringes are generated by double optical fibers, and the fringes are projected on the surface of the measured object. The piezoelectric ceramic phase shifter drives the mirror to generate phase shift, and seven interference images with different phase shift are obtained on the CCD detector. By collecting and processing the deformed interference fringes modulated by the height information of the measured object, the three-dimensional topography information of the measured object is recovered. A specific three-dimensional measurement optical path scheme of point diffraction interference fringe projection based on phase-shifting of double fiber splitting path is proposed, and the phase-height recovery mathematical model of the measurement system is constructed. Based on the simulation of seven-step phase-shifting projection interference fringes, the interference image processing algorithm is studied, which mainly includes interference image preprocessing, edge detection, edge extraction, phase extraction, branch-cut phase unwrapping and phase-height information restoration based on the continuous phase information distribution obtained by unwrapping. The system structure parameters are calibrated. According to the relationship between the pixel coordinates of the camera image and the world coordinates, Zhang Zhengyou camera calibration is used to calibrate the camera parameters. Based on the lens imaging principle and the mathematical relationship of the projection system, the specific calibration algorithm formula is derived. By using the electronically controlled displacement table and the corner detection method, the distance from the optical center of the camera lens to the reference plane and the central projection angle
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Shiyu ZHAO, Fen GAO. Three-dimensional Shape Measurement Technology Based on Point Diffraction Interference[J]. Acta Photonica Sinica, 2025, 54(5): 0512001
Category: Instrumentation, Measurement and Metrology
Received: Oct. 18, 2024
Accepted: Dec. 24, 2024
Published Online: Jun. 18, 2025
The Author Email: Fen GAO (gaofen8128@163.com)