Chinese Journal of Lasers, Volume. 50, Issue 18, 1803001(2023)

Influence of Passivation Layer and P‑Type Base Structure Optimization on Charge Collection Efficiency of Electron Bombardment Active Pixel Sensor

Yuanyuan Song, De Song*, Ye Li, Weijun Chen, and Chunyang Liu**
Author Affiliations
  • College of Science, Changchun University of Science and Technology, Changchun 130022, Jilin, China
  • show less
    References(20)

    [1] Wang W, Li Y, Chen W J et al. Simulation of the electrostatic distribution in the proximity focusing structure of an EBCMOS[J]. IEEE Photonics Journal, 12, 6901210(2020).

    [3] Barbier R, Depasse P, Baudot J et al. First results from the development of a new generation of hybrid photon detector: EBCMOS[C], 23-27(2008).

    [4] Aebi V W, Boyle J J. Electron bombarded active pixel sensor[P].

    [5] Dominjon A, Chabanat E, Depasse P et al. LUSIPHER large-scale ultra-fast single photo-electron tracker[C], 1527-1531(2009).

    [6] Barbier R, Cajgfinger T, Calabria P et al. A single-photon sensitive EBCMOS camera: the LUSIPHER prototype[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 648, 266-274(2011).

    [7] Hirvonen L M, Suhling K. Photon counting imaging with an electron-bombarded pixel image sensor[J]. Sensors, 16, 617(2016).

    [8] Zhang H Z, Mu Y N, Wang L K et al. Impact of passivation layer on photoelectron energy loss in EBCMOS low-light-level imaging device: a simulation and experimental study[J]. Chinese Journal of Vacuum Science and Technology, 37, 991-996(2017).

    [9] Liu H L, Wang X, Tian J S et al. High resolution electron bombareded complementary metal oxide semiconductor sensor for ultraviolet detection[J]. Acta Physica Sinica, 67, 014209(2018).

    [10] Qiao K, Wang S K, Cheng H C et al. Experimental study on the electron sensitivity of BCMOS sensor influenced by surface passivation film[J]. Infrared and Laser Engineering, 49, 0418002(2020).

    [11] Ma R, Liang X C, Wu Z Q. The morphology of AuGeNi and AuGe films on GaAs during heating[J]. Journal of Chinese Electron Microscopy Society, 2, 49-53(1983).

    [12] Browning R, Li T Z, Chui B et al. Empirical forms for the electron/atom elastic scattering cross sections from 0.1 to 30 keV[J]. Journal of Applied Physics, 76, 2016-2022(1994).

    [13] Joy D C, Luo S. An empirical stopping power relationship for low-energy electrons[J]. Scanning, 11, 176-180(1989).

    [14] Fiebiger J R, Muller R S. Pair-production energies in silicon and germanium bombarded with low-energy electrons[J]. Journal of Applied Physics, 43, 3202-3207(1972).

    [15] Hirvonen L M, Jiggins S, Sergent N et al. Photon counting imaging with an electron-bombarded CCD: towards wide-field time-correlated single photon counting (TCSPC)[J]. Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment, 787, 323-327(2015).

    [16] Song D, Shi F, Li Y. Simulation of charge collection efficiency for EBAPS with uniformly doped substrate[J]. Infrared and Laser Engineering, 45, 0203002(2016).

    [17] Yan Y Y, Qian Y S, Zhang J Z et al. Design of spectral response test system for electron bombardment active pixel sensor[J]. Laser&Optoelectronics Progress, 59, 1304001(2022).

    [18] Xu Z H. Simulation study of EBCMOS charge collection efficiency[J]. Journal of Sensor Technology and Application, 10, 187-192(2022).

    [19] Tian J F, Song D, Chen W J et al. Influence of doping distribution in electron multiplier surface layer on charge collection efficiency of EBCMOS[J]. Semiconductor Optoelectronics, 42, 45-51, 105(2021).

    [20] Wang W, Li Y, Chen W J et al. Influence of proximity focusing structure and electric field distribution on electron trajectory in the EBCMOS[J]. Chinese Optics, 13, 713-721(2020).

    Tools

    Get Citation

    Copy Citation Text

    Yuanyuan Song, De Song, Ye Li, Weijun Chen, Chunyang Liu. Influence of Passivation Layer and P‑Type Base Structure Optimization on Charge Collection Efficiency of Electron Bombardment Active Pixel Sensor[J]. Chinese Journal of Lasers, 2023, 50(18): 1803001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Materials

    Received: Aug. 16, 2022

    Accepted: Nov. 21, 2022

    Published Online: Aug. 28, 2023

    The Author Email: De Song (songde_cust@163.com), Chunyang Liu (liucy169@nenu.edu.cn)

    DOI:10.3788/CJL221159

    Topics