Fig. 1. EBAPS structure and electrons’ multiplication and charge collection process. (a) EBAPS structure; (b) electrons’ multiplication and charge collection process

Fig. 2. Simulation results when passivation layer material is Al₂O₃. (a) Charge collection efficiency (CCE) distribution map in 5×5 pixel area; (b) motion trace of incident electron on X-Z plane; (c) distribution probability of secondary electrons

Fig. 3. Simulation results when passivation layer material is SiO₂. (a) Charge collection efficiency (CCE) distribution map in 5×5 pixel area; (b) motion trace of incident electron on X-Z plane; (c) distribution probability of secondary electrons

Fig. 4. CCE under different passivation layer thicknesses.(a) Passivation layer thickness is 25 nm; (b) passivation layer thickness is 50 nm; (c) passivation layer thickness is 75 nm; (d) passivation layer thickness is 100 nm

Fig. 5. Distribution probability of secondary electrons under different passivation layer thicknesses. (a) Passivation layer thickness is 25 nm; (b) passivation layer thickness is 50 nm; (c) passivation layer thickness is 75 nm; (d) passivation layer thickness is 100 nm

Fig. 6. CCE at different incident electron energies. (a) E₀=2 keV; (b) E₀=4 keV; (c) E₀=6 keV

Fig. 7. Distribution probability of secondary electrons under different incident electron energies. (a) E₀=2 keV; (b) E₀=4 keV; (c) E₀=6 keV

Fig. 8. Charge collection efficiency under different P-type base thicknesses. (a) Base thickness is 5 μm; (b) base thickness is 10 μm; (c) base thickness is 15 μm; (d) base thickness is 20 μm

Fig. 9. Distribution probability of secondary electrons under different P-type base thicknesses. (a) Base thickness is 5 μm; (b) base thickness is 10 μm; (c) base thickness is 15 μm; (d) base thickness is 20 μm

Fig. 10. Charge collection efficiency of 5×5 pixels area at different doping concentrations. (a) at different doping concentrations is 10¹⁵ cm^-3; (b) at different doping concentrations is 10¹⁶ cm^-3; (c) at different doping concentrations is 10¹⁷ cm^-3; (d) at different doping concentrations is 10¹⁸ cm^-3; (e) at different doping concentrations is 5×10¹⁸ cm^-3; (f) at different doping concentrations is 10¹⁹ cm^-3