Journal of Synthetic Crystals, Volume. 54, Issue 6, 924(2025)
Research Progress on Application of Machine Learning in Molecular Beam Epitaxy Growth
Fig. 2. (a) RHEED pattern; (b) AFM image; (c) θ-2θ scanned XRD pattern; (d) cross-sectional HAADF-STEM image of the SrRuO3 thin film with the RRR of 50~52; (e) magnified image near the interface in Fig.(d); (f) magnified image near the interface in Fig.(e)[34]
Fig. 3. Change relationship between of epitaxial TiN films with temperature under different conditions[35]
Fig. 4. Overarching framework for the application of machine learning in RHEED[37]
Fig. 5. Probability of achieving 7×7 RHEED pattern in two different deoxidation runs[38]
Fig. 6. RHEED model multiclass classification model includes convolutional neural network and fully connected layer[42]
Fig. 7. Controlled growth process of high-density quantum dots[43]
Fig. 8. (a) K-means clustering up to K = 7 for SrTiO3 on TbScO3; (b) mean representative images in each cluster; (c) K-means minimization function plotted for each value of K[45]
Fig. 9. NMF with rank 4 for LAO. (a)~(d) corresponding coefficient plots for the four clusters; (e)~(h) corresponding basis plots for the four clusters[47]
Fig. 10. PCA results. (a) Six PCs of the RHEED video for the 3UC-thick-ReSe2 thin film, PC1 shows the diffraction signal of graphene, PC2 contains the signals of both the graphene and ReSe2 layers, PC3-6 show the signal of only the 2D growth of ReSe2 layer; (b) corresponding score plots; (c) original RHEED video; (d)~(e) modified RHEED video. Blue and orange lines denote the (0,0) and (2,0) diffraction streaks of the ReSe2 thin film (shown in the inset), respectively[50]
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Zaihong YANG, Can ZHOU, Liuyan FAN, Yanhui ZHANG, Zezhong CHEN, Pingping CHEN. Research Progress on Application of Machine Learning in Molecular Beam Epitaxy Growth[J]. Journal of Synthetic Crystals, 2025, 54(6): 924
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Received: Nov. 1, 2024
Accepted: --
Published Online: Jul. 8, 2025
The Author Email: Zezhong CHEN (zzhchen@usst.edu.cn)